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1

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

Ville Kaajakari, Jyrki Kiihamäki, Aarne Oja, Sami Pietikäinen, Ville Kokkala, Heikki Kuisma

Journal:

Sensors and Actuators A: Physical

Year:

2006

Language:

english

File:

PDF, 486 KB

english, 2006

2

SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Monday 18 September 2000)] Micromachining and Microfabrication Process Technology VI - Loading effects in deep silicon etching

Karttunen, Jani, Kiihamaki, Jyrki, Franssila, Sami, Karam, Jean Michel, Yasaitis, John A.

Year:

2000

Language:

english

File:

PDF, 257 KB

english, 2000

3

[IEEE 2019 IMAPS Nordic Conference on Microelectronics Packaging (NordPac) - Copenhagen, Denmark (2019.6.11-2019.6.13)] 2019 IMAPS Nordic Conference on Microelectronics Packaging (NordPac) - Low-temperature Cu-Cu thermocompression bonding for encapsulation of a MEMS Mirror

Ailas, Henri, Saarilahti, Jaakko, Pensala, Tuomas, Kiihamaki, Jyrki

Year:

2019

Language:

english

File:

PDF, 725 KB

english, 2019

4

[IEEE 2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, United Kingdom (2019.10.6-2019.10.9)] 2019 IEEE International Ultrasonics Symposium (IUS) - Wobbling Mode AlN-Piezo-MEMS Mirror Enabling 360-Degree Field of View LIDAR for Automotive Applications

Pensala, Tuomas, Kiihamaki, Jyrki, Kyynarainen, Jukka, Dekker, James, Gorelick, Sergey, Pekko, Panu, Pernu, Tapio, Ylivaara, Oili, Gao, Feng, Morits, Dmitry

Year:

2019

File:

PDF, 436 KB

2019

5

Studies on aluminium corrosion during and after HF vapour treatment

Heini Ritala, Jyrki Kiihamäki, Mikko Heikkilä

Journal:

Microelectronic Engineering

Year:

2010

Language:

english

File:

PDF, 592 KB

english, 2010

6

Outgassing of Water Molecules During Silicon Fusion Bonding

Feng Gao, Ari Hokkanen, Panu Pekko, Anu Kärkkäinen, Jyrki Kiihamäki

Journal:

Physics Procedia

Year:

2012

Language:

english

File:

PDF, 1.12 MB

english, 2012

7

Microelectromechanical delay lines with slow signal propagation

Alastalo, Ari T, Kiihamäki, Jyrki, Seppä, Heikki

Journal:

Journal of Micromechanics and Microengineering

Year:

2006

Language:

english

File:

PDF, 706 KB

english, 2006

8

HV NMOS Transistor for IC/MEMS Integration on SOI

Jansson, Roope, Ronkainen, Hannu, Kiihamäki, Jyrki, Mellin, Joni

Journal:

Physica Scripta

Year:

2004

Language:

english

File:

PDF, 154 KB

english, 2004

9

SPIE Proceedings [SPIE Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS - Paris, France (Tuesday 9 May 2000)] Design, Test, Integration, and Packaging of MEMS/MOEMS - Micromechanical silicon precision scale

Oja, Aarne S., Sillanpaa, Teuvo, Seppae, H., Kiihamaki, Jyrki, Seppala, P., Karttunen, Jani, Riski, Kari, Courtois, Bernard, Crary, Selden B., Gabriel, Kaigham J., Karam, Jean Michel, Markus, Karen W.

Year:

2000

Language:

english

File:

PDF, 825 KB

english, 2000

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